Browse Prior Art Database

Glass Photomask Alignment for Simultaneous Exposure of Two-Sided Panels

IP.com Disclosure Number: IPCOM000099945D
Original Publication Date: 1990-Mar-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 3 page(s) / 71K

Publishing Venue

IBM

Related People

Gargano, P: AUTHOR [+4]

Abstract

Disclosed is a technique, including tooling, which allows precise alignment of top-to-bottom glass photomasks for simultaneous exposure of two-sided panels.

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Glass Photomask Alignment for Simultaneous Exposure of Two-Sided Panels

       Disclosed is a technique, including tooling, which allows
precise alignment of top-to-bottom glass photomasks for simultaneous
exposure of two-sided panels.

      The tooling is comprised of metal bushings and pins (Fig. 1)
which are cemented into the top and bottom glasses after the two
glasses are aligned to each other in a special fixture (Fig. 2).

      The two major components of this disclosure are: slotted
bushing and alignment fixture.  The slotted bushing is shown in Fig.
1.  This type of bushing has been built to eliminate glass breakage
during compression of the glass/product sandwich at exposure it
replaces one of the round hole bushings on the top glass and its
purpose is to accommodate dimensional differences inherently
destructive with fixed pins and bushings (Fig. 3).

      The specially built alignment fixture is shown in Fig. 2.  This
fixture permits the locking in place of the bottom glass.  The top
glass is superimposed to the bottom one and, by means of the fine
screw pushers on the fixture, is aligned and locked in place until
the cement anchoring the bushings is hardened and cured.

      Procedure The overall technique requires that two holes be
drilled on both the top and the bottom glass artwork at specified
points indicated by drilling fiducials.
Round hole bushings are cemented into the bottom glass.
On the alignment fixture, the top glass i...