Browse Prior Art Database

Tool Set for Deposition Equipments

IP.com Disclosure Number: IPCOM000100020D
Original Publication Date: 1990-Mar-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 3 page(s) / 180K

Publishing Venue

IBM

Related People

Penloup, R: AUTHOR [+3]

Abstract

Physical vapor deposition (PVD) is a process in use in many industrial domains and, more particularly, for metallizing substrates. The mechanical part of the evaporator is mainly comprised of a so-called set of tools the design of which is critical since it should not only meet the various requirements dictated by the process (e.g. mechanical, thermal and chemical requirements) but also take into account the frequent handling operations executed by the operator. In most cases, trouble is experienced when changing the set of tools, i.e., when handling them. In addition, it is often necessary to operate with a set of tools not appropriate to the evaporator, whose handling is complicated and requires long shut-down periods of the evaporator.

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This is the abbreviated version, containing approximately 52% of the total text.

Tool Set for Deposition Equipments

       Physical vapor deposition (PVD) is a process in use in
many industrial domains and, more particularly, for metallizing
substrates. The mechanical part of the evaporator is mainly comprised
of a so-called set of tools the design of which is critical since it
should not only meet the various requirements dictated by the process
(e.g. mechanical, thermal and chemical requirements) but also take
into account the frequent handling operations executed by the
operator. In most cases, trouble is experienced when changing the set
of tools, i.e., when handling them. In addition, it is often
necessary to operate with a set of tools not appropriate to the
evaporator, whose handling is complicated and requires long shut-down
periods of the evaporator.

      The present disclosure aims to globally overcome this problem.
It is based on the idea which consists, on the one hand, in
disassembling the set of tools into various functional, modular and
easily removable sub-assemblies and, on the other hand, in avoiding
as much as possible the use of screws, nuts and washers by engaging,
whenever it is possible, male elements with female elements.

      Fig. 1 is a photograph that presents a general view of the set
of tools installed inside the evaporation chamber.

      Fig. 2 is a photograph that presents a partial view of the
evaporation sources once the source shields and lower casings have
been removed.  (This operation is made quickly and without using any
tools.)
      The sub-assemblies consist of the following:

      The substrate carrier 1 comprises a dome and its support. The
dome bears on a ring held by three arms.

      The heating system 2 is comprised of the heating units and the
attachment unit thereof. The heating units are assembled without
using any screws and engaged on a ring mounted on centering pins.
      The evaporation sources 3 comprise.
      a) a resistive source which includes the...