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Convex Decomposition Algorithm to Etch a Semiconductor Using E-Beam Lithography

IP.com Disclosure Number: IPCOM000100303D
Original Publication Date: 1990-Mar-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 1 page(s) / 42K

Publishing Venue

IBM

Related People

Redpath, RJ: AUTHOR

Abstract

To efficiently etch a semiconductor circuit by E-Beam Lithography, the maximal areas must be found. Currently, when using E-Beam technology for etching a circuit, algorithms are employed which find the maximal areas to efficiently etch the circuit. By reducing the physical movement of the E-Beam apparatus and employing deflection to also reduce this physical movement, the process of etching a circuit is less time- consuming. An example of maximal areas for etching efficiently is as follows: (Image Omitted) These are the maximal areas possible, i.e., the largest possible to the next largest possible.

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Convex Decomposition Algorithm to Etch a Semiconductor Using E-Beam Lithography

       To efficiently etch a semiconductor circuit by E-Beam
Lithography, the maximal areas must be found. Currently, when using
E-Beam technology for etching a circuit, algorithms are employed
which find the maximal areas to efficiently etch the circuit. By
reducing the physical movement of the E-Beam apparatus and employing
deflection to also reduce this physical movement, the process of
etching a circuit is less time- consuming. An example of maximal
areas for etching efficiently is as follows:

                            (Image Omitted)

 These are the maximal areas possible, i.e., the
largest possible to the next largest possible.

      However, while present algorithms for computing the maximal
areas for etching of a semiconductor circuit are less time-comsuming,
they do normally require a large CPU-based machine. In this regard,
it has been found that the algorithm 'Convex Decomposition for
Maximal Area Composition' can be used very effectively to etch a
semiconductor with E-Beam Lithography.  The 'Convex Decomposition for
Maximal Area Composition' was published by the Robotic Institute,
Carnegie-Mellon University, March 1984, and submitted at the IEEE
Conference on Applications of AI December, 1984, under Crowley, J.L.,
"Navigation for an Intelligent Mobile Robot."  While the original
intended use of the algorithm is for guidance control of an
auton...