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Novel Heat And Rotate Device for General Vacuum Thin Film Fabrication

IP.com Disclosure Number: IPCOM000100314D
Original Publication Date: 1990-Apr-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 1 page(s) / 35K

Publishing Venue

IBM

Related People

Harris, HN: AUTHOR [+2]

Abstract

It is demonstrated here that it is possible to heat while continuously rotating the heater in pure oxygen environments, in excess of 600oC; this can be accomplished without heater degradation.

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Novel Heat And Rotate Device for General Vacuum Thin Film Fabrication

       It is demonstrated here that it is possible to heat while
continuously rotating the heater in pure oxygen environments, in
excess of 600oC; this can be accomplished without heater degradation.

      The heater consists of a high temperature ceramic thin-plate
heating substrate material (alumina, silicon nitride, or silicon
carbide were tested).  These were embedded with a heating element
(i.e., tungsten, graphite, etc.) by hot isostatic pressing.  It
should be noted that these heater elements must be isolated from the
heated surface as they will degrade in pure oxygen environments above
600oC.  This heat capability allows in-situ substrate cleaning prior
to deposition.

      The rotate device consists of two bearings with electrical
contacts made across the ball bearings themselves.  The bearings can
consist of two roller, needle or thrust bearings separated by an
insulating ceramic sleeve for continuous rotation of the heater.  The
heater wires have continuous contact between the outside race and the
rotating inside race.  The preferable voltage should be DC at no
greater than 120 volts at 1.5 amps.  Arcing in the race is minimized
and not a problem at these voltage/current values.  By using the
needle bearings, the contact area is increased and arcing is not a
problem.

      Rotation is accomplished by using an in-vacuum stepper motor,
good to 10x-10 Torr at 1-1000 rpm...