Browse Prior Art Database

Simultaneous Double-Sided Expose of Thin Film Product With Automatic Registration

IP.com Disclosure Number: IPCOM000100343D
Original Publication Date: 1990-Apr-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 1 page(s) / 41K

Publishing Venue

IBM

Related People

Burke, EJ: AUTHOR [+4]

Abstract

Disclosed is an invention for automatic simultaneous double-sided expose of thin film product. Either proximity or contact expose can be accomplished using this tool.

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This is the abbreviated version, containing approximately 100% of the total text.

Simultaneous Double-Sided Expose of Thin Film Product With Automatic Registration

       Disclosed is an invention for automatic simultaneous
double-sided expose of thin film product.  Either proximity or
contact expose can be accomplished using this tool.

      The expose module incorporates automatic alignment of the lower
glass master (see the figure) to the upper glass master, as well as
automatic alignment of the upper and lower glass master frame to the
product.  This is accomplished using a vision system for location
feedback in conjunction with a dot-on-hole registration scheme.
After glass-to-glass and glass-to-product alignment are accomplished,
the glass masters close on the product.  As the glass masters close,
force sensors tell the computer when the closure force is correct.

      The XY0 motion of the lower glass master is driven by three
stepper motors.  The XY0 motion of the glass holding frame is also
driven by three stepper motors.  Vertical motion of the lower glass
master is monitored by an absolute linear encoder in conjunction with
the force sensing system so that multiple product thickness is easily
accommodated.