Browse Prior Art Database

Optical Microscope Wafer Holder And Rotating Stage

IP.com Disclosure Number: IPCOM000100415D
Original Publication Date: 1990-Apr-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 2 page(s) / 56K

Publishing Venue

IBM

Related People

Knight, EV: AUTHOR

Abstract

This removable wafer holder assembly facilitates wafer rotation under a microscope and minimizes foriegn material (FM) contamination of wafers during wafer inspection.

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Optical Microscope Wafer Holder And Rotating Stage

       This removable wafer holder assembly facilitates wafer
rotation under a microscope and minimizes foriegn material (FM)
contamination of wafers during wafer inspection.

      Referring to the figure, base block 2 is shaped to fit an
opening in a standard microscope stage which provides X and Y
positioning.
Rotating wafer support member 4 is disposed above base block 2
supported on ball bearing 6, as shown in the magnified center portion
of cross section A-A.  Screw 8 and tapped block 10 are free to rotate
with wafer support 4 because contact between tapped block 10 and base
2 is through ball bearing 12.  Degree of ease of rotation of wafer
support 4 may be adjusted by tightening or loosening screw 8 in block
10.  Frictional elements, components of ball bearings 6 and 12, are
hidden from the clean environment of wafer inspection areas to avoid
FM contamination of wafers.

      With this assembly installed in the microscope stage,
installation or removal of wafer 14 into or out of wafer support 4 is
performed by carrying the wafer on a vacuum pencil (not shown).
Wafer support 4 is constructed in a shape resembling a steering
wheel.  Relief notches 16 in the outer rim of wafer support 4
facilitate movement of the vacuum pencil during wafer loading and
unloading.  Central portions of wafer support 4 are lower than outer
portions of spokes 18 and rim 20 of the steering wheel, thus
providing a centralize...