Browse Prior Art Database

Clean Room Robot And Conveyor

IP.com Disclosure Number: IPCOM000100505D
Original Publication Date: 1990-Apr-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 2 page(s) / 50K

Publishing Venue

IBM

Related People

Midori, Y: AUTHOR

Abstract

The mechanical portions of the assembly of robots and conveyors are considered as the major source of the particles in the clean room.

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Clean Room Robot And Conveyor

       The mechanical portions of the assembly of robots and
conveyors are considered as the major source of the particles in the
clean room.

      The assembly robot and conveyor have the following advantages
of securing and keeping high cleanliness in the clean room.
   1.   To seal all mechanical portions and give minus pressure in
order to prevent the particles from spreading (Figs. 1-3).
   2.   To keep the mechanical slider away from the critical surface
in order to prevent the particles from the mechanical slide (Fig. 4).
 3.   To incorporate all electrical cables and air tubes into the
head arm in order to prevent the particles generated by rubbing of
cables and air tubes from spreading (Fig. 5).