Browse Prior Art Database

Method for Producing "Micro Pieces" in Materials Utilizing VLSI Processing Techniques

IP.com Disclosure Number: IPCOM000100586D
Original Publication Date: 1990-May-01
Included in the Prior Art Database: 2005-Mar-15
Document File: 2 page(s) / 55K

Publishing Venue

IBM

Related People

Cronin, J: AUTHOR

Abstract

A technique for producing micro pieces of any size in virtually any material and not limited by standard metallurgical techniques is disclosed.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 81% of the total text.

Method for Producing "Micro Pieces" in Materials Utilizing VLSI Processing Techniques

       A technique for producing micro pieces of any size in
virtually any material and not limited by standard metallurgical
techniques is disclosed.

      Many fields of endeavor utilize objects/particles of various
materials in specified micro sizes to monitor processes, quality
control, medical treatment, etc. What is required is a reliable and
inexpensive method for producing micro pieces in a wide range of
materials and sizes extending into the angstrom range. VLSI
techniques for making both small and large quantities of micro pieces
follows.

      For making small quantities of micro size pieces, refer to
Figs. 1 and 2.  First, a release layer #1 is deposited on a
substrate. This is followed by the deposition and definition of
release layer #2. Next a material which will make up the final micro
piece is deposited on top of the second release layer. The micro
piece material is then etched back or polished to be coplanar with
release layer #2. Finally, release layers #2 and #1 are chemically
dissolved, yielding the micro piece structures. The non-dissolved
micro pieces end up in the chemical bath and are filtered out for
use.

      Referring to Figs. 3 and 4, when mass quantities of a micro
structure are required, a mold image is made in a non-erodible
substrate. Next, a release layer is conformally deposited over the
mold image followed by a deposition of the fin...