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Electroerosion Micropump

IP.com Disclosure Number: IPCOM000100703D
Original Publication Date: 1990-May-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 2 page(s) / 100K

Publishing Venue

IBM

Related People

Blum, A: AUTHOR [+4]

Abstract

With the advent of silicon-based VLSI chip packaging, the removal of dissipated heat has developed into a major problem. To resolve this problem, micromechanically fabricated tubes in the silicon material of the chips or the silicon chip carrier have been proposed. For this purpose, the coolant has to be pressed through the microtubes from an external conventional source, which prevents miniaturizing a given computer unit. The mechanism described in this article is an electrostatic micropump which permits the efficient implementation of a self- contained cooling means for liquid circulation in, say, a silicon carrier.

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Electroerosion Micropump

       With the advent of silicon-based VLSI chip packaging, the
removal of dissipated heat has developed into a major problem.  To
resolve this problem, micromechanically fabricated tubes in the
silicon material of the chips or the silicon chip carrier have been
proposed.  For this purpose, the coolant has to be pressed through
the microtubes from an external conventional source, which prevents
miniaturizing a given computer unit.  The mechanism described in this
article is an electrostatic micropump which permits the efficient
implementation of a self- contained cooling means for liquid
circulation in, say, a silicon carrier.

      The basic structure of an electrostatic micropump is shown in
Fig.  1.  The electrically rechargeable membrane A subdivides the
pump into two separate pump chambers.  The pumping motion of the
membrane is produced by the electrostatic forces between the electric
charges which an electrical control circuit periodicially supplies to
the membrane and the pump housing.  As the dimensions are small,
significant electrostatic forces are obtained.

      To increase the liquid pumping pressure despite the short
movement amplitudes of the membrane, several pump elements can be
connected in series along a microtube.  A further increase of the
pumping pressure may be obtained by a booster concept.  This concept
is based on cascading pressure chambers 3 and 4 which are filled with
hydraulic liquid (Fig. 2). ...