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Micro Machine: Bellows Structure And Process

IP.com Disclosure Number: IPCOM000100811D
Original Publication Date: 1990-Jun-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 2 page(s) / 84K

Publishing Venue

IBM

Related People

Cronin, JE: AUTHOR [+4]

Abstract

Miniature bellows are useful in micro machine applications, e.g., pressure transducers, linear motion normal to a substrate surface, pumping fluids, etc. A bellows is constructed with materials and processes used to make micro electronic devices.

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Micro Machine: Bellows Structure And Process

       Miniature bellows are useful in micro machine
applications, e.g., pressure transducers, linear motion normal to a
substrate surface, pumping fluids, etc.  A bellows is constructed
with materials and processes used to make micro electronic devices.

      A typical bellows structure is formed as shown in cross section
in the figure.  Stationary conductor 10 is deposited on substrate 12.
Conductor 10 is etched to form a disc having an accessible outer edge
connection region (not shown).  Ducts 14 and 16 are made through
conductor 10 and substrate 18 by laser burning or etching.  A
material, e.g., parylene (PPX) 8 is deposited and planarized to
create removable plugs for the top of ducts 14 and 16 and expose the
surface of conductor 10.  A conductor is next deposited and etched to
form connective annulus 20.  PPX 22 is conformally deposited, filling
the opening in annulus 20.  A planarizing process is used to expose
the surface of conductor 20 before depositing conductor 24.
Following definition of conductor 24 into a disc with a hole in its
center, PPX 26 is deposited and planarized to expose conductor 24.
Conductor 28 is then deposited and defined as a small connective
annulus.  PPX 30 is deposited and planarized and conductor 32 is
deposited and defined identically to disc 24.  PPX 34 is deposited
and planarized. Conductor 36 is deposited and defined to form an
outer connective annulus.  PPX 38 is deposited and planarized.
Conductor 40 is then deposited and defined as a top disc for the
bellows.  PPX layer 42 is deposited and planarized to expose
c...