Browse Prior Art Database

Active Cutter for Micromachining MLC Substrates

IP.com Disclosure Number: IPCOM000100828D
Original Publication Date: 1990-Jun-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Long, DC: AUTHOR [+2]

Abstract

An apparatus is disclosed which can statically or dynamically adjust the position of a fly cutting tool while it rotates on a micromilling machine spindel. The apparatus is shown in the figure. The input of the cutter drive signal 1 is connected to a high voltage servo amp 2 which generates a high voltage electrical signal that enters through slip rings 3 attached to the rotating machine spindle 4. The high voltage signal is connected to the piezo actuator 5. The piezo actuator 5 gets longer or shorter according to the amplitude and polarity of the drive signal, thus driving the attached cutter tip 6 to make a deeper or shallower cut into the work 7. The position sensor 8 monitors the cutter tip 6 position and sends an electrical signal out through slip rings 9 connected to the high voltage servo amp 2.

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This is the abbreviated version, containing approximately 86% of the total text.

Active Cutter for Micromachining MLC Substrates

       An apparatus is disclosed which can statically or
dynamically adjust the position of a fly cutting tool while it
rotates on a micromilling machine spindel.  The apparatus is shown in
the figure.  The input of the cutter drive signal 1 is connected to a
high voltage servo amp 2 which generates a high voltage electrical
signal that enters through slip rings 3 attached to the rotating
machine spindle 4.  The high voltage signal is connected to the piezo
actuator 5.  The piezo actuator 5 gets longer or shorter according to
the amplitude and polarity of the drive signal, thus driving the
attached cutter tip 6 to make a deeper or shallower cut into the work
7.  The position sensor 8 monitors the cutter tip 6 position and
sends an electrical signal out through slip rings 9 connected to the
high voltage servo amp 2.  This closes a servo loop control system,
resulting in accurate control of the cutter tip 6 cutting depth.

      This system can be used to statically or dynamically adjust the
position of the attached cutter tip.  Some of the uses of the system
are:
      -    to correct for substrate tilt;
      -    to dynamically follow the contours of warped substrates
yielding uniform metal or dielectric thickness, which would improve
substrate electrical performance;
      -    to move the cutter tip in small increments for precise
infeed control (a DC adjustable voltage is required);...