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Exposure/Inspection Interface Utilizing Indexed Sequential Access Method On a PC Local Area Network

IP.com Disclosure Number: IPCOM000101010D
Original Publication Date: 1990-Jun-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 1 page(s) / 36K

Publishing Venue

IBM

Related People

Asbury, GS: AUTHOR

Abstract

This article describes a system that eliminates the necessity for manufacturing operators to fill out logsheets containing critical test exposure data. Through the use of Indexed Sequential Access Method (ISAM) files, test wafer inspection priority, based on a first-in, first- out scheme, is maintained.

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This is the abbreviated version, containing approximately 91% of the total text.

Exposure/Inspection Interface Utilizing Indexed Sequential Access Method On a PC Local Area Network

       This article describes a system that eliminates the
necessity for manufacturing operators to fill out logsheets
containing critical test exposure data.  Through the use of Indexed
Sequential Access Method (ISAM) files, test wafer inspection
priority, based on a first-in, first- out scheme, is maintained.

      The exposure tool operator inputs pertinent test wafer data at
a PC which is part of a Local Area Network.  This data then is
forwarded to an ISAM file which prioritizes jobs by date and time.
The implicit sorting and stack nature of the ISAM file structure
facilitates the implementation of this scheme.  With the inspector
selecting a job, the system queries the network retrieving all
relevant data from the exposure tool files.

      After calculations of bias and overlay values [*] for the job,
a series of screens allows for any input necessary to communicate the
inspection disposition to the exposure tool operator.  If critical
image measurements are needed, a similar process again utilizing an
ISAM file is initiated. The exposure tool operator is electronically
notified upon completion of the inspection.  The operator then
recalls the necessary job parameters from the central or hub PC of
the network.

      Additional features at both inspection and exposure stations
allow for an historical perspective of the bias and overlay
operation...