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Silicon Micro Valve

IP.com Disclosure Number: IPCOM000101069D
Original Publication Date: 1990-Jun-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Landrock, J: AUTHOR [+4]

Abstract

This micro valve is preferably used as an inlet/outlet valve for low-stroke, high-frequency pump chambers. The valves usually employed for this purpose are replaced by a plurality of micro valves. Micro valves have an extremely high switching frequency and a small hysteresis.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Silicon Micro Valve

       This micro valve is preferably used as an inlet/outlet
valve for low-stroke, high-frequency pump chambers.  The valves
usually employed for this purpose are replaced by a plurality of
micro valves.  Micro valves have an extremely high switching
frequency and a small hysteresis.

      The valves consist of very thin, flexible tongues (length about
10 mm, thickness less than 100 nm) which, upon pressure reversal,
close a pipe (input/output channel). Such structures are produced by
micromechanical methods.

      The micro valve opens and closes a pipe in the Si wafer, which
is passed by a liquid or gaseous medium.  Fig. 1 is a schematic
longitudinal view of the valve's design. The valve tongue is flexible
and slightly biased so that the valve is closed in its original
position.  It is made of a suitable material, such as silicon
dioxide.  The material chosen may be varied and combined with other
materials in a plurality of ways, using metal layers permitting the
use of electrical fields for controlling or measuring the tongue
movement.

      The valve tongue is designed as a spring/mass system permitting
extremely high switching frequencies in the kHz range.  In other
words, the valve dimensions depend on the frequency of pressure
reversal.  For obtaining a particular flow volume, several valves are
connected in parallel (Fig. 2).