Browse Prior Art Database

Mask Handling Tool

IP.com Disclosure Number: IPCOM000101145D
Original Publication Date: 1990-Jul-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 1 page(s) / 30K

Publishing Venue

IBM

Related People

Moore, RM: AUTHOR [+2]

Abstract

A tool mechanism is described which enables an operator to manipulate mask materials, as used in the fabrication of wafers without touching the materials. The tool has no moving parts and is designed to manipulate any size of mask and to meet all requirements of a clean room environment.

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Mask Handling Tool

       A tool mechanism is described which enables an operator
to manipulate mask materials, as used in the fabrication of wafers
without touching the materials.  The tool has no moving parts and is
designed to manipulate any size of mask and to meet all requirements
of a clean room environment.

      The tool, as shown in the figure, utilizes a stainless steel
handle 10, which can be made to any desired length. Two slotted
blocks 11, made of a hard insulating material, are attached to
bracket 12.  The slots in blocks 11 are machined with a .005"
clearance to allow for a slip fit over the two corners of mask 13.
By sliding the tool over the two corners, the operator can secure
mask 13 and place it on a fixture (not shown) without touching the
mask.  This is done by using gravitational force on mask 13, creating
a wedge effect between mask 13 and slotted blocks 11.