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Browse Prior Art Database

Rotating Probe Assembly With Z Motion

IP.com Disclosure Number: IPCOM000101265D
Original Publication Date: 1990-Jul-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 2 page(s) / 74K

Publishing Venue

IBM

Related People

Elenius, P: AUTHOR [+3]

Abstract

Disclosed is a device for the alignment and placement of semiconductor chips and capacitors to multilayer ceramic substrates. It has independent Z motion for five probes in a 60 mm span with a 0.0002 mm accuracy and repeatability for each probe.

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Rotating Probe Assembly With Z Motion

       Disclosed is a device for the alignment and placement of
semiconductor chips and capacitors to multilayer ceramic substrates.
It has independent Z motion for five probes in a 60 mm span with a
0.0002 mm accuracy and repeatability for each probe.

      The probe assembly works in conjunction with a vision system
which examines each chip and chip site.  Each probe is capable of
moving in both theta and Z directions to accomplish proper alignment
and placement.  The Z motion capability is needed to retract four
probes 13 while the remaining probe 13 is placing a chip.  Theta
motion capability is required so that separate X and Y movements can
be made once the chip centers are established.  To move the five
probes 13 in the theta direction, the rack 15 and five pinion gears
17 are used.  A sixth direction pinion gear 19 attaches to a gear
reducer 20 and stepping motor 21 to control the motion translated to
the rack 15.  The five other pinions 23 are attached to spools 25
through which the probes 13 pass.  Each pinion gear 17 has two dowels
27 which extend out of its top face and are a predetermined distance
apart to allow an orientation pin 29 on the probe 13 to slip between.
The orientation pins 29 and two dowels 27 are the interconnecting
means which connect the probes 13 to each gear 17, thus controlling
both theta and Z motion.