Browse Prior Art Database

Pressure Sensing to Control Z Axis Movement for Imprinting or Hot Embossing

IP.com Disclosure Number: IPCOM000101537D
Publication Date: 2005-Mar-16
Document File: 2 page(s) / 118K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that switches from force/pressure controls to Z-height/motor count controls when viscosity changes are detected in dielectric materials.

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Pressure Sensing to Control Z Axis Movement for Imprinting or Hot Embossing

Disclosed is a method that switches from force/pressure controls to Z-height/motor count controls when viscosity changes are detected in dielectric materials.

Background

Currently, micro-feature imprint quality and thickness varies across package features. To address this, standard technologies apply a force, pressure, and temperature for a set period of time (see Figure 1). 

General Description

When dielectric material changes viscosity in the disclosed method, it is detected by pressure changes (through load cells), and the disclosed method switches to Z-height control. This allows for precise movements to the correct distance required to achieve via and trace (i.e. feature) specifications (see Figure 2). The following are the steps for creating the disclosed method:

1.      The substrate material is loaded between the upper and lower micro tools.

2.      A set amount of pressure is applied to the micro tool through the air cylinders while the ¬†temperature is being applied.

3.      As the dielectric changes state from solid to liquid, the pressure changes and the load cell detects this.

4.      Once the load cell detects the change, it switches the control from pressure to the encoder motor counts, which moves to a pre-measured distance (e.g. 40 microns). This allows the micro tools to achieve the appropriate depth into the dielectric and control the overall thickness of the specific features on the traces and vias....