Browse Prior Art Database

Wafer Insertion Tool

IP.com Disclosure Number: IPCOM000101601D
Original Publication Date: 1990-Aug-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 2 page(s) / 61K

Publishing Venue

IBM

Related People

Moore, RM: AUTHOR [+2]

Abstract

Described is a wafer insertion tool which automatically inserts semiconductor wafers into a wafer carrier and functions within a Class 10 clean room environment. The tool is designed to control particle-producing mechanisms so that wafer contamination is reduced.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 65% of the total text.

Wafer Insertion Tool

       Described is a wafer insertion tool which automatically
inserts semiconductor wafers into a wafer carrier and functions
within a Class 10 clean room environment.  The tool is designed to
control particle-producing mechanisms so that wafer contamination is
reduced.

      The wafer insertion tool disclosed herein is designed to
automatically prepare a wafer for processing by a robotically
controlled work cell.  The tool is designed to function within a
Class 10 clean room environment.  It is totally enclosed with the
exception of slots required to operate the mechanism.  A vacuum
attachment is used internally to control and remove any particles
produced by the mechanism.  Sensors are strategically located within
the mechanism to verify positioning, alignment and sequencing of the
tool.

      The drawing is a perspective view of the tool of this
disclosure.  Carrier 15 is first placed on tool 13. Spring-loaded
securing slides 11 on carrier 15 are opened to accept wafer 10 from a
robot (not shown). This action also locks and locates carrier 15
against two locating pins 14 on tool 13.  Within tool 13 is a center
vacuum- controlled pedestal (not shown) which rises when the robot
positions wafer 10 over tool 13. Wafer 10 has been previously
pre-aligned with a wafer notch to match carrier pin 12. When the
robot positions wafer 10 on carrier 15 over tool 13, vacuum is
applied to secure wafer 10 to the pedestal.

      Next, the p...