Browse Prior Art Database

Automatic Mask Load/Unload Mechanism

IP.com Disclosure Number: IPCOM000101617D
Original Publication Date: 1990-Aug-01
Included in the Prior Art Database: 2005-Mar-16
Document File: 3 page(s) / 94K

Publishing Venue

IBM

Related People

Moore, RM: AUTHOR [+2]

Abstract

A mechanism is described whereby glass masks, as used in the fabrication of wafers for semiconductors, are automatically loaded and unloaded for either manual or robotic operation. Special attention is given to assure a clean-room environment.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 55% of the total text.

Automatic Mask Load/Unload Mechanism

       A mechanism is described whereby glass masks, as used in
the fabrication of wafers for semiconductors, are automatically
loaded and unloaded for either manual or robotic operation. Special
attention is given to assure a clean-room environment.

      The automatic mask load/unload mechanism consists of carrier
mounting fixture 1, as shown in Fig. 1, glass mask alignment nest 2,
carrier loose alignment pins 3, glass mask clamping mechanism Y axis
(upper) 4, carrier locking and flat spring mechanism 5, flat spring
mechanism 6, shown in Fig. 2, glass mask insertion mechanism 7,
X-locating mechanism 8, X-spring pusher mechanism 9, glass mask
clamping mechanism Y axis (lower) 10, fixture mounting pedestal 11,
Y-locating stop 12, shown in Fig. 3, and vacuum line 13.

      In actual operation, the following sequence takes place:
 ­ The operator places a carrier into carrier mounting fixture 1,
between the carriers loose alignment pins 3, using a hand tool for
placement.
        Carrier mounting fixture 1 aligns and locks the carrier into
position using X-spring pusher mechanism 9.
        Carrier mounting fixture 1 depresses the glass mask locking
springs 5 and 6, enabling the glass mask insertion mechanism 7 to
move up into position to accept the glass mask.
        The operator places the glass mask into alignment nest 2,
using a hand tool for placement.
        Glass mask clamping mechanism...