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Collimator for X-Ray Lithography

IP.com Disclosure Number: IPCOM000101894D
Original Publication Date: 1990-Sep-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Briska, M: AUTHOR [+5]

Abstract

This article covers a group of thin-walled collimators, resembling the cells of a honeycomb, which are used to increase the collimation of X-rays by glancing angle reflection along the tube axis.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Collimator for X-Ray Lithography

       This article covers a group of thin-walled collimators,
resembling the cells of a honeycomb, which are used to increase the
collimation of X-rays by glancing angle reflection along the tube
axis.

      The following method is proposed for economically using X-rays
in photolithography (single-chip illumination).

      A rotating anode (of, e.g., chromium), operating in a soft
continuum, serves as an X-ray source.  A microscopically structured
collimator is arranged between the rotating anode and the mask.  An
enlarged cut-out of the collimator is shown in the figure.
Microcapillaries, resembling the cells of a honeycomb, with metal
walls of, e.g., nickel, and a high X-ray absorption coefficient are

                            (Image Omitted)

 produced by X-ray depth
lithography.  The capillaries and walls are dimensioned such that the
inner width is typically 6 mm and the wall thickness is 2 mm.  By
combining several such groups, a collimator of the required length
(say, 1800 mm) is obtained.  The collimator, having extremely smooth
inner walls, is capable of conducting the X-rays over a distance of
some mm almost without any loss of intensity, beam portions with an
angle of incidence of > 0.5o being absorbed, so that a parallelized
radiation is obtained.