Browse Prior Art Database

Positioning System for Reel-to-Reel Flexible Substrates

IP.com Disclosure Number: IPCOM000102069D
Original Publication Date: 1990-Oct-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 2 page(s) / 59K

Publishing Venue

IBM

Related People

Busacco, RA: AUTHOR [+2]

Abstract

A positioning system for a reel-to-reel flexible substrate (polyimide) transfer system allows unrestricted movement of the substrate. The system can move in the X, Y, and d directions, with options for the Z direction. The system works in the following manner.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 69% of the total text.

Positioning System for Reel-to-Reel Flexible Substrates

       A positioning system for a reel-to-reel flexible
substrate (polyimide) transfer system allows unrestricted movement of
the substrate.  The system can move in the X, Y, and d directions,
with options for the Z direction.  The system works in the following
manner.

      The normal restriction of the substrate active area in the X
and d direction is overcome by a method which creates a slack or
bubble condition on both sides of the active area.  This condition,
coupled with a vacuum hold-down or other type of clamping method of
the active area, allows the substrate to be maneuvered in all
directions to obtain a precise position.  Positioning is accomplished
utilizing standard manual or motorized X-Y-d and Z positioners.
Pattern recognition of the active area can be independently
accomplished using either optical or mechanical devices to
accommodate individual process requirements.

      An example of how the reel-to-reel positioning system is
implemented is shown in the drawing using an expose machine.  The
expose machine shown is a projection-type machine.

      The method of producing a bubble condition is accomplished by
the use of lifter rods 1 which are positioned underneath and adjacent
to the active area of the substrate 2.  The lifter rods 1 raise the
substrate 2 up and create a bubble.  The precise location and exact
shape of the lifter rods are determined by product requirements...