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Technique for Applying Kinematic Mounting Pads to X-Ray Masks

IP.com Disclosure Number: IPCOM000102077D
Original Publication Date: 1990-Oct-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Kendall, RA: AUTHOR

Abstract

Disclosed is a technique for the precision application of kinematic mounting pads to X-ray masks. Using this technique the position of the front surface of the mask is fixed with respect to the mounting pads. This is an important feature. Without this technique variations in the thickness of masks must be compensated by individually positioning and levelling each mask before it is placed in an E-beam tool.

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Technique for Applying Kinematic Mounting Pads to X-Ray Masks

       Disclosed is a technique for the precision application of
kinematic mounting pads to X-ray masks.  Using this technique the
position of the front surface of the mask is fixed with respect to
the mounting pads.  This is an important feature.  Without this
technique variations in the thickness of masks must be compensated by
individually positioning and levelling each mask before it is placed
in an E-beam tool.

      In Fig. 1 X-ray mask 1 is placed on bonding fixture 2 such that
the front surface 3 of the mask contacts the three reference spheres
4.  The mask has three holes 5 through the ring into which kinematic
mounting pads will be bonded.  The mask is oriented on the bonding
fixture such that these holes are directly over the three bonding
spheres 6.

      In Figs. 2 and 3 kinematic mounting pads 7 are inserted into
holes 5 such that they contact their respective bonding spheres 6.
The pads are bonded in place using UV cured adhesive or a suitable
alternative.

      In Fig. 4 the mask is removed from the fixture when bonding of
the pads is complete.

      X-ray masks fabricated using this technique alleviate the need
for individual adjustment when mounting masks in an E-beam system,
thereby reducing the risks of contamination and damage.

      (In Figs. 3 and 4 hidden lines are not shown.)