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Low Temperature Lpcvd Aluminum Oxide Using an Aluminum Dialkoxide- Betadiketonate

IP.com Disclosure Number: IPCOM000102088D
Original Publication Date: 1990-Oct-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 2 page(s) / 60K

Publishing Venue

IBM

Related People

Barbee, S: AUTHOR [+5]

Abstract

A class of compounds useful for CVD aluminum oxide called aluminum dialkoxide-betadiketonates is disclosed. These compounds allow deposition of a stoichiometric aluminum oxide film at temperatures below 450oC. The primary advantage of this group of aluminum alkoxides is its members' four-fold coordination about the Al atom that thereby discourages oligomerization which can reduce the utility of the corresponding tris-alkoxides.

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Low Temperature Lpcvd Aluminum Oxide Using an Aluminum Dialkoxide- Betadiketonate

       A class of compounds useful for CVD aluminum oxide called
aluminum dialkoxide-betadiketonates is disclosed.  These compounds
allow deposition of a stoichiometric aluminum oxide film at
temperatures below 450oC.  The primary advantage of this group of
aluminum alkoxides is its members' four-fold coordination about the
Al atom that thereby discourages oligomerization which can reduce the
utility of the corresponding tris-alkoxides.

      Four-fold coordination is achieved through the attachment of
ligands (consisting of two alkoxide groups and a betadiketonate
group) to a central aluminum atom.  All ligands bind to the central
aluminum atom via their constituent oxygen atoms (See the figure).

      The alkoxide ligand groups (-OR1, -OR'1) can be identical or
different and may include but not be limited to:  propoxide,
isopropoxide, butoxide, sec-butoxide, and tert-butoxide.  The chelate
group contains a three-carbon chain backbone.  Other alkyl groups
-R3, R3' (including but not limited to -CH3 AND -C2H5) and alkoxy
groups -OR2 (including but not limited to -OCH3 and -OC2H5) may be
attached to this chain.  Thus, the chelate group should be
sufficiently large to create steric hindrance toward intermolecular
aggregation.  However, the size of the attached groups should not be
so great so as to decrease vapor pressure by excessive molecular
weight.  In addition, the s...