Browse Prior Art Database

Mask Manufacturing Engineering

IP.com Disclosure Number: IPCOM000102138D
Original Publication Date: 1990-Oct-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 1 page(s) / 30K

Publishing Venue

IBM

Related People

Ekblom, CJ: AUTHOR [+3]

Abstract

A system to transport a substrate throughout a manufacturing process line in a paperless, boxless mode, maintaining a hands-off attitude and contamination-free atmosphere is described.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Mask Manufacturing Engineering

       A system to transport a substrate throughout a
manufacturing process line in a paperless, boxless mode, maintaining
a hands-off attitude and contamination-free atmosphere is described.

      In the figure, the handler 1 containing a substrate 2 is
located in the rails 3 via a dovetail opening 4.

      The rails 3 (two sections form a unit) are mounted at the
point- of-use stations.  The rails 3 have dovetail openings 4 to
accommodate one or more handlers 1.  The substrate 2 begins its
progress by being placed in a handler 1.  Each handler 1 can
accommodate any size substrate 2.  As each process is completed, the
substrate 2 is returned to the handler 1.  The handler 1 is then slid
out of the dovetail location 4 and moved to the next process step.
The number of substrate 2 positions establishes the KAN BAN (the
amount of backlog at each position) limit for each process.