Browse Prior Art Database

Water Atomization: for Humidification Using Deionized Water and Compressed Air for Clean Room Application in Advanced Hi-Tech Buildings

IP.com Disclosure Number: IPCOM000102375D
Original Publication Date: 1990-Nov-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 2 page(s) / 63K

Publishing Venue

IBM

Related People

Paoloni, JA: AUTHOR

Abstract

This article concerns the proper application and location of a water atomization system for introducing humidification into clean room environments.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 65% of the total text.

Water Atomization: for Humidification Using Deionized Water and Compressed Air for Clean Room Application in Advanced Hi-Tech Buildings

       This article concerns the proper application and location
of a water atomization system for introducing humidification into
clean room environments.

      Steam humidification has been the most conventional and
convenient method of introducing water vapor into an environment,
having advantages such as economy of installation and ease of
control.  As presently employed, however, it is a particular source
of contamination to semiconductor chip-producing clean room
environments, conveying impurities that are solid, liquid or gaseous
in nature.  Sources of such contamination have been identified as a
carry-over from the steam generator due sudden reductions in boiler
pressure, high water level followed by rapid load reductions, foaming
due to inadequate water treatment, trap malfunctions and steam
generator and piping materials, e.g., Cr/Ni/Cu/Fe/C.  Highly
efficient or "Absolute Filters", which can almost completely remove
potential contaminants with particle sizes N 0.3 microns and above
are of little or no value in removing particles of 0.1 micron or less
in size.

      Problems such as those cited with steam humidification systems
can be overcome through appropriate application of water atomization
to provide humidification to chip-producing clean room environments.
Whenever the ratio of return air to outside air is...