Browse Prior Art Database

Glass Vacuum Cleaning Tool for Sinter Heat Treat Furnaces

IP.com Disclosure Number: IPCOM000102522D
Original Publication Date: 1990-Nov-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Herbst, B: AUTHOR

Abstract

Disclosed is a tool for vacuum cleaning particulate contamination from Sinter Heat Treat Furnace Tubes. The contamination is composed of glass particles and silicon fragments from broken wafers. Prior corrective actions for wafer breakages inside the furnace consisted of either blowing the particles out with a shepherd's hook or shutting down the furnace and changing the tube.

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Glass Vacuum Cleaning Tool for Sinter Heat Treat Furnaces

       Disclosed is a tool for vacuum cleaning particulate
contamination from Sinter Heat Treat Furnace Tubes.  The
contamination is composed of glass particles and silicon fragments
from broken wafers.  Prior corrective actions for wafer breakages
inside the furnace consisted of either blowing the particles out with
a shepherd's hook or shutting down the furnace and changing the tube.

      The vacuum cleaner tool is made of quartz glassware. It
consists of two glass plates separated by bonded quartz spacers.  One
plate is solid, but the other has a hole in the center where it is
bonded to a hollow glass tube.  The plates can be circular, half
circles, or any geometric form that conforms to the sinter furnace
shape.  The vacuum intake corresponding to shape would be 360
degrees, 180 degrees, respectively, or other.

      This glass vacuum tool is connected by heavy walled rubber
vacuum hose to a vacuum source.  The source can be a vacuum cleaner
canister or central vacuum system.

      When a wafer breaks in a sinter heat treat furnace, rake out
the large wafer pieces with the glass tool, then turn on the vacuum
to suck up the smaller pieces and particles.

      Particle count monitors can be run afterward to confirm that
particulate contamination has been reduced to a predetermined
acceptable level.

      The glass vacuum tool is cleaner and safer than the shepherd's
hook.  Blow...