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Shutter Potential Control for Partially Ionized Evaporant Deposition

IP.com Disclosure Number: IPCOM000102678D
Original Publication Date: 1990-Dec-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 2 page(s) / 52K

Publishing Venue

IBM

Related People

Roberts, S: AUTHOR [+3]

Abstract

For improved partially ionized evaporant deposition (PIED), a shutter is maintained at a negative high potential (equivalent to substrate potential) before shutter opening and at ground potential after shutter opening. This capability allows adjustment of deposition rate and vapor ionization conditions prior to opening the shutter. Thus, conditions of film formation on the substrate remain more nearly constant from start to finish of deposition.

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Shutter Potential Control for Partially Ionized Evaporant Deposition

       For improved partially ionized evaporant deposition
(PIED), a shutter is maintained at a negative high potential
(equivalent to substrate potential) before shutter opening and at
ground potential after shutter opening.  This capability allows
adjustment of deposition rate and vapor ionization conditions prior
to opening the shutter.  Thus, conditions of film formation on the
substrate remain more nearly constant from start to finish of
deposition.

      Referring to the figure, substrate 2 is supported in conductive
holder 4.  Initially, partially ionized evaporant 6 is deposited on
the under side of shutter 8, onto grounded sidewall shield 10, and
into rate monitor 12.  Variables affecting deposition rate determined
by rate monitor 12 and ionization characteristics of evaporant 6
measured by current monitor 14 for current supplied by variable high
voltage supply 16 are then adjusted and stabilized.  Switch 18 is in
the A position as shown.  Then, shutter 8 is opened and switch 18 is
thrown to the B position.

      One method of construction and operation of shutter 8 is to
rotate it out of the vapor stream through a slit in shield 10.  In
this case, switch 18 may be constructed as shown in the inset.  Shaft
20 is electrically and physically connected to shutter 8.  A
commutator on rotatable shutter shaft 20 is comprised of conductive
region 22 (shaded) and the remaining surf...