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Browse Prior Art Database

E-Beam Loader

IP.com Disclosure Number: IPCOM000102686D
Original Publication Date: 1990-Dec-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 3 page(s) / 108K

Publishing Venue

IBM

Related People

Brown, ME: AUTHOR [+5]

Abstract

This article describes a mechanism for safely loading/unloading greensheets automatically into and out of an electron beam (E-Beam) drilling chamber.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 52% of the total text.

E-Beam Loader

       This article describes a mechanism for safely
loading/unloading greensheets automatically into and out of an
electron beam (E-Beam) drilling chamber.

      Typically, greensheets have been loaded by manual means and
positioned by use of magnetic devices.  The E-Beam loading mechanism
disclosed herein does not use magnetic devices for positioning which
could interrupt the E-Beam function.

      The mechanism of this disclosure is shown in the drawings where
Fig. 1 is a top view and Fig. 2 is a front view.  At the
start of operation chamber assembly 2 is at high vacuum.  Arm 7 is at
its home position.  Large gate valve 8 is closed.  Small gate valve
11 is open, i.e., airlock 9 is at atmospheric pressure.

      Shuttle assembly 12 is out and up.  X-Y table assembly 4 is at
its home position.  The lead curtain (not shown) of door assembly 6
is up, lifting a bellows (not shown) on the X-Y table assembly 4.  At
this time there are no carriers in the system.  A greensheet is
manually loaded on to a carrier 13.  The carrier 13 is manually
loaded onto the shuttle assembly 12.  The operator then starts the
machine cycle. The shuttle assembly 12 moves the carrier 13 into the
upper position of the airlock 9.  The carrier 13 is lifted off the
shuttle assembly 12 which is then retracted out of the airlock 9.
The shuttle assembly 12 now may be loaded with a new carrier 13.
Small gate valve 11 is closed and the airlock 9 is evacuated by
vacuum assembly 10.  When airlock 9 reaches its vacuum level, the
large gate valve 8 opens.  The arm 7 moves to its highest point and
rotates underneath the carrier 13 in the airlock 9.  The carrier 13
is lowered on to the arm 7.  The arm 7 rotates to the X-Y table
assembly 4 and lowers to its midpoint position.  This drops the
carrier 13 on the X-Y table assembly 4.  The arm 7 then rotates to
its midposition.  The carrier 13 is clamped into place using the
rotary motion of the arm 7 returning to its midposi...