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Layered Amorphous Carbon

IP.com Disclosure Number: IPCOM000102780D
Original Publication Date: 1990-Jan-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 1 page(s) / 24K

Publishing Venue

IBM

Related People

Cuomo, JJ: AUTHOR [+3]

Abstract

Amorphous carbon has improved wear resistance and low hydrogen content when deposited as alternate layers having dominant diamond-like insulative bonds and dominant conductive graphite bonds.

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Layered Amorphous Carbon

      Amorphous carbon has improved wear resistance and low hydrogen
content when deposited as alternate layers having dominant
diamond-like insulative bonds and dominant conductive graphite bonds.

      This layered structure is achieved by depositing the carbon via
ion beam sputtering and varying the deposition pressure to alter the
energy distribution of the sputtered particles from the target and
the carbon conductivity.  High pressure deposition produces
predominantly graphite type, conductive material, while low pressure
deposition results in predominantly diamond-like, non-conductive
material. Both forms contain approximately 1% hydrogen and prevent
crack propagation from one layer into another.

      Disclosed anonymously.