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Pressure Equalizing System for Externally Applied Load in High Temperature Furnaces

IP.com Disclosure Number: IPCOM000103024D
Original Publication Date: 1990-May-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 1 page(s) / 31K

Publishing Venue

IBM

Related People

McCurty, JE: AUTHOR [+2]

Abstract

A cycle employed for product substrates requires that a constant load be applied to the substrate stacks while in the high temperature furnace. This article describes the utilization of an externally applied load to meet this requirement, with resultant savings in heat-up and cool-down time over that of the previous procedures.

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Pressure Equalizing System for Externally Applied Load in High Temperature Furnaces

      A cycle employed for product substrates requires that a
constant load be applied to the substrate stacks while in the high
temperature furnace.  This article describes the utilization of an
externally applied load to meet this requirement, with resultant
savings in heat-up and cool-down time over that of the previous
procedures.

      As shown in the figure below, the externally applied load F is
transmitted through an equalizing series of beams (A, B, and C), and
pivot points (D), assuring that an equal force is conveyed to each
stack of substrates in the furnace (six appear in the schematic).
The equalizing beam can be easily loaded and the system requires
little in additional furnace capacity as compared to the weights
formerly needed on each stack, thereby offering a significant
improvement in process cycle time.

      Disclosed anonymously.