Browse Prior Art Database

Reflow Solder On GaAs Wafers with Rapid Thermal Anneal Equipment

IP.com Disclosure Number: IPCOM000103104D
Original Publication Date: 1990-Jun-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 1 page(s) / 54K

Publishing Venue

IBM

Related People

Gallagher, JP: AUTHOR

Abstract

Disclosed is a description of a system that was specifically designed and built that will only subject the wafer to the precise temperature and period of time required.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 69% of the total text.

Reflow Solder On GaAs Wafers with Rapid Thermal Anneal Equipment

      Disclosed is a description of a system that was specifically
designed and built that will only subject the wafer to the precise
temperature and period of time required.

      As with all semiconductor device manufacturing, the temperature
that the devices are subjected to is critical, especially in the
final operations of manufacturing.  This is even more critical in
manufacturing gallium arsenide devices.

      A rather simple and readily available semi-automatic rapid
thermal anneal system was selected.  The system was then modified to
permit the wafer to be heated in an environment of 100% hydrogen.  A
special chamber environment monitoring port was also added so that
the oxygen/moisture level could be determined.  This same port was
also used for thermocouple access to the chamber for performing
temperature uniformity measurements.  A gas purifier was added to the
hydrogen supply line.  The chamber exhaust gas was circulated through
a system where the residue hydrogen was removed.  Electrically both
the hydrogen removal system and the hydrogen gas supply were
connected to the rapid thermal anneal system so that they all operate
as one system.

      When the system is operating, a thermocouple is in contact with
the back side of the wafer at all times.  This thermocouple is used
for both temperature control and display.  A pyrometer is used as a
back-up temperature control...