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Browse Prior Art Database

Gold-Nickel Lidseal Process Improvement (Hydrogen Cleaning)

IP.com Disclosure Number: IPCOM000103108D
Original Publication Date: 1990-Jun-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 1 page(s) / 22K

Publishing Venue

IBM

Related People

Beatty, CT: AUTHOR

Abstract

This article suggests a method for improving the lidseal bond using silver glass die attach materials.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Gold-Nickel Lidseal Process Improvement (Hydrogen Cleaning)

      This article suggests a method for improving the lidseal bond
using silver glass die attach materials.

      Silver glass die attach materials require high curing
temperatures to 410@C in air to drive off the organic components
present in the die attach materials. Unfortunately, this results in a
substantial amount of Ni out diffusion and oxidation at the seal
band.

      These problems can be eliminated by performing a preclean
operation in a reducing atmosphere of 100% hydrogen prior to the
lidseal operation.  A peak temperature of 330@C with a dwell time of
8 minutes above 280@C has been used successfully.

      Disclosed anonymously.