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Contact Film Cleaner

IP.com Disclosure Number: IPCOM000103239D
Original Publication Date: 1990-Aug-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 1 page(s) / 37K

Publishing Venue

IBM

Related People

Cooper, DW: AUTHOR [+2]

Abstract

Contamination by dust particles that are microns in size and smaller can greatly reduce yield in the manufacture of microelectronic components. As described below, thin plastic films commercially available have been found not only to protect parts from particulate contamination but also to remove substantial fractions of the particles.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Contact Film Cleaner

      Contamination by dust particles that are microns in size and
smaller can greatly reduce yield in the manufacture of
microelectronic components.  As described below, thin plastic films
commercially available have been found not only to protect parts from
particulate contamination but also to remove substantial fractions of
the particles.

      Flat surfaces were deliberately contaminated by particles
microns in size and smaller.  Various thin (1 mil and thinner)
plastic films, such as polyethylene, polycarbonate, and
polyfluorinates, were put in contact with the surfaces, then removed.
Contact was created by pressing the film to the surface with another
smooth surface (soft) or even with the pressure from an air jet.
Multiple applications of one of the films produced almost complete
removal of half-micron silicon dioxide particles applied dry to the
surface.  Some types of films removed large fractions of the
contaminating particles, but others did not.  Some types of films
deposited large numbers of particles from their surfaces to the
product surfaces, but others did not. Bulk and surface additives are
thought to be major causes of the differences in behavior.

      Film-wrapped products were sent thousands of miles without
experiencing increased particle contamination, while control samples
were contaminated.

      Disclosed anonymously.