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System for Controlling Distribution of Gas Injected into a Vacuum Process

IP.com Disclosure Number: IPCOM000103378D
Original Publication Date: 1990-Oct-01
Included in the Prior Art Database: 2005-Mar-17
Document File: 1 page(s) / 49K

Publishing Venue

IBM

Related People

Baker, JM: AUTHOR [+3]

Abstract

Disclosed is a method of designing hollow gas injection systems (GIS) for vacuum process chambers where the required conductances of the gas inlets into the vacuum chamber are much smaller than the conductances that can be obtained by drilling holes at the appropriate places in the GIS.

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System for Controlling Distribution of Gas Injected into a Vacuum Process

      Disclosed is a method of designing hollow gas injection systems
(GIS) for vacuum process chambers where the required conductances of
the gas inlets into the vacuum chamber are much smaller than the
conductances that can be obtained by drilling holes at the
appropriate places in the GIS.

      A given GIS is usually designed to achieve a predetermined gas
injection distribution inside of the vacuum chamber.  The gas
injection pattern gives rise to the desired gas concentration within
the vacuum chamber at a given gas flow rate through the GIS and a
given gas pressure inside of the GIS.

      It is claimed that in GIS designs where the desired injection
pattern requires uncommonly small conductances at GIS inlets, the
desired conductances can be achieved by fabricating the injector from
a porous material, such as sintered metal or ceramic with the
appropriate conductance per unit area.  Alternatively, an array of
nozzles made of this porous material could be inserted into a solid
GIS. With an array of nozzles it would also be possible, by adjusting
the area of porous material in individual nozzles, to inject a
non-uniform flow into the system to compensate for non-uniformities
in the geometry or process or to tailor a concentration profile for
some particular purpose.

      A modification of this design may be required when the GIS is
used in a process that deposits material i...