Browse Prior Art Database

Method for film coating uniformity on 3-D objects

IP.com Disclosure Number: IPCOM000103385D
Publication Date: 2005-Mar-17
Document File: 3 page(s) / 26K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for film coating uniformity on three-dimensional (3-D) objects. Benefits include improved functionality.

This text was extracted from a Microsoft Word document.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 54% of the total text.

Method for film coating uniformity on 3-D objects

Disclosed is a method for film coating uniformity on three-dimensional (3-D) objects. Benefits include improved functionality.

Background

              Conventional release coating applications for imprint technology cannot coat 3-D objects. Additionally, the applications cannot meet coating thickness-variation requirements of .5 µm.

              Two types of coating systems are conventionally available. Spin coaters are designed for photo resist and other wafer fabrication applications. X/Y actuators have a dispense nozzle that is moved above the object being coated. The X/Y coater is very poor at coating 3-D objects because the atomized liquid particles make contact at right angles, except as wetted by release coating. As a result, this method is best suited for coating flat surfaces.

              The spin coater is the better method for 3-D objects but is not optimal. The nozzle has a radial spinning motion above the substrate. The front of a 3-D object is coated as the substrate turns towards the nozzle. The backside of the object is coated as it turns away from the nozzle. (Features that are orthogonal to the traverse direction are coated.) No coating occurs on the sides of the features that are parallel to the traverse direction, except as wetted by the release coating (see Figure 1).

General description

      The disclosed method applies films onto 3-D objects, including imprint microtools, to optimize the coating uniformity of sidewalls and the top surface. The method provides improved control of coating thickness variation.

      The key elements of the method include:

•             Atomizing dispense nozzle

•             Dual-axis stage with orbital oscillation capability and a vacuum chamber, where appropriate and required

•             For larger objects, X/Y motion (traverse)...