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Fabrication of GaAlAs Lasers

IP.com Disclosure Number: IPCOM000103513D
Original Publication Date: 1990-Dec-01
Included in the Prior Art Database: 2005-Mar-18
Document File: 1 page(s) / 30K

Publishing Venue

IBM

Related People

Blum, SE: AUTHOR [+4]

Abstract

During the fabrication of GaAlAs lasers it is necessary to coat the mirror surfaces (facets) with a protective oxide coating. This coating improves the lifetimes of the diode lasers. The oxide coating must be applied only to the facets; metallized surfaces of the lasers must be protected during the coating process. In order to do this, polymer films are used to protect the metallized areas. However, the polymers become hardened by electron bombardment during the oxide film application and are thereafter made insoluble to the usual solvents and difficult to remove by reactive ion etching.

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Fabrication of GaAlAs Lasers

      During the fabrication of GaAlAs lasers it is necessary to coat
the mirror surfaces (facets) with a protective oxide coating.  This
coating improves the lifetimes of the diode lasers.  The oxide
coating must be applied only to the facets; metallized surfaces of
the lasers must be protected during the coating process.  In order to
do this, polymer films are used to protect the metallized areas.
However, the polymers become hardened by electron bombardment during
the oxide film application and are thereafter made insoluble to the
usual solvents and difficult to remove by reactive ion etching.

      In order to be able to remove the polymer films easily, short
wavelength ultraviolet radiation is used.  Such radiation has a
wavelength less than about 200 nm, and can be provided from, for
example, a ArF excimer laser (193 nm) or a low pressure Hg lamp (185
nm).  The oxide coating is transparent to the UV radiation and is
unaffected by the exposure used to remove the polymer film.

      Disclosed anonymously.