Browse Prior Art Database

Mechanism for Removing Contamination in Hard Disk Fabrication

IP.com Disclosure Number: IPCOM000103618D
Original Publication Date: 1993-Jan-01
Included in the Prior Art Database: 2005-Mar-18
Document File: 2 page(s) / 68K

Publishing Venue

IBM

Related People

Mueller, W: AUTHOR [+3]

Abstract

Described is a hardware implementation to remove contamination during fabrication of hard disks. A mechanism is designed to prevent hard disk delamination by removing contamination prior to sputtering operations of hard disk fabrication.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 72% of the total text.

Mechanism for Removing Contamination in Hard Disk Fabrication

       Described is a hardware implementation to remove
contamination during fabrication of hard disks.  A mechanism is
designed to prevent hard disk delamination by removing contamination
prior to sputtering operations of hard disk fabrication.

      During the fabrication of hard disks, disks are first washed
and cleaned before loading onto cassette equipment and robotic
loading pallets for a sputtering process.  All contaminations must be
removed before a thin film is applied, or the thin film could peel
off causing delamination of the disk.  The delamination cannot be
detected after the thin film is applied; however, causes of
delamination can be prevented.  The concept described herein provides
a mechanism to ensure that the surface of the disk is free of
contamination before sputtering is applied.

      Fig. 1a is a front view and Fig. 1b is a side view of
the mechanism used to ensure that the disk is free of contamination.
Cassette 1 contains a quantity of disks 2 and sits on conveyor belt 3
so that disks can be moved by lifter 4.  Two nozzles 5, as shown in
Fig. 1b, are positioned on the left side and two nozzles 6 are
positioned on the right side.  Each nozzle contains an ion generator
(not shown) mounted at its end.  Nitrogen is supplied through port 7
and the flow of nitrogen is regulated by means of regulator 8 and is
filtered by means of filter 9.

      In actual operation,...