Browse Prior Art Database

Button Contacts for Probe Card Applications

IP.com Disclosure Number: IPCOM000103634D
Original Publication Date: 1993-Jan-01
Included in the Prior Art Database: 2005-Mar-18
Document File: 2 page(s) / 69K

Publishing Venue

IBM

Related People

Chailloux, D: AUTHOR [+2]

Abstract

Described below is high-density and low-profile connector for use in a vacuum chamber of an electron beam tester. It is so designed to ensure the contacting between the probe card and the multilayer mother board. The main concern was the minimum working distance between the electro-optic column and the device under test (DUT).

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Button Contacts for Probe Card Applications

       Described below is high-density and low-profile connector
for use in a vacuum chamber of an electron beam tester.  It is so
designed to ensure the contacting between the probe card and the
multilayer mother board.  The main concern was the minimum working
distance between the electro-optic column and the device under test
(DUT).

      The fuzz button is a cylinder of 50 mm gold-plated copper wire.
For probe card applications, the button is 1 mm diameter and 0.8 mm
high.  The selected pattern consists of 316 buttons in four
concentric rows.  Fig. 1 shows the probe card assembly. The buttons
are inserted into 1 mm diameter holes in an 0.8 mm thick epoxy glass
carrier.  The carrier has two registration holes to receive alignment
pins.  Epoxy glass was chosen as the carrier material to provide an
expension coefficient close to that of the multilayer board and probe
card.  Contact pads on both the multilayer mother board and probe
card are 1 mm diameter and gold-plated too.  Recommended button
compression force is about 110 grams.  To provide this load, twelve
screws are located on a fourth concentric row, which compress the
buttons between the probe card and the multilayer mother board (Fig.
2).

      The disclosed fuzz button connectors can also be used on other
types of equipment everywhere the working distance between the
objective (optic or electronic) and the DUT is critical, such as
liquid crystal...