Browse Prior Art Database

Conductive Polmer Mask for E-beam Assisted Circuitization

IP.com Disclosure Number: IPCOM000103718D
Original Publication Date: 1993-Jan-01
Included in the Prior Art Database: 2005-Mar-18
Document File: 2 page(s) / 56K

Publishing Venue

IBM

Related People

Afzali-Ardakani, A: AUTHOR [+4]

Abstract

Disclosed are disposable conductive polymer masks used in E-beam circuitization of the polymer (polymer composites) substrates and methods of fabrication thereof.

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This is the abbreviated version, containing approximately 83% of the total text.

Conductive Polmer Mask for E-beam Assisted Circuitization

       Disclosed are disposable conductive polymer masks used in
E-beam circuitization of the polymer (polymer composites) substrates
and methods of fabrication thereof.

      Use of high energy electron beam for drilling and
circuitization of polymers and polymer composites have been well
documented in the literature.  During the electron beam machining,
the non-conductive polymeric susbtrate builds up surface charge which
adversely affect, the focus and spatial stability of the electron
beam.  To overcome the charge build-up, a thin sheet (0.005-0.025 mm)
of polyester film is coated with a solution of Teflon* AF-1600 in
fluorinated hydrocarbon to a dry thickness of 0.002-0.005 mm.  Then a
thin (500-1000 Ao) film of aluminum is vacuum deposited on the
polyester side and the matrix is laminated from the Teflon side on
the polymer (or polymer composite) to be drilled.  After E-beam
exposure upon which the entire mask and part of the polymeric
substrate are removed in the exposed area, the substrate is coated
with metal paste (copper or tungsten) which fills the drilled area
(Fig. 1a).  The coated substrate is dried and then immersed in a
fluorinated carbon solvent which causes the lift-off of the mask from
unexposed area without damaging the substrate or metal paste (Fig.
2).

      An alternative mask can also be made from carbon-filled Teflon
AF-1600 (Fig. 3).  This composite, which is conductive...