Browse Prior Art Database

Silicon Disk for Small Hard Disk Drive

IP.com Disclosure Number: IPCOM000103834D
Original Publication Date: 1993-Feb-01
Included in the Prior Art Database: 2005-Mar-18
Document File: 4 page(s) / 60K

Publishing Venue

IBM

Related People

Akutsu, S: AUTHOR [+4]

Abstract

Disclosed is a silicon disk as a media disk for the small hard disk drive, such as 1.8 inches or less in disk diameter. Silicon disks are fabricated on a large silicon wafer, and manufacturing processes such as texturing, magnetic layer deposition, and overcoating are processed sequentially on a silicon wafer. Photolithographic technique on a silicon disk provides grooves for discrete tracks and pits in a magnetic layer. Discrete tracks improve magnetic recording performance, and pits for servo tracking eliminate servo track writing for hard disk drive. After these processes, an etching or a drilling or other processes separate disk from a silicon wafer.

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Silicon Disk for

Small Hard Disk Drive

      Disclosed is a silicon disk as a media disk for the small hard
disk drive, such as 1.8 inches or less in disk diameter.  Silicon
disks are fabricated on a large silicon wafer, and manufacturing
processes such as texturing, magnetic layer deposition, and
overcoating are processed sequentially on a silicon wafer.
Photolithographic technique on a silicon disk provides grooves for
discrete tracks and pits in a magnetic layer.  Discrete tracks
improve magnetic recording performance, and pits for servo tracking
eliminate servo track writing for hard disk drive.  After these
processes, an etching or a drilling or other processes separate disk
from a silicon wafer.

      Fig. 1 shows the example of producing many small disks 1 on a
large silicon wafer 2.  When a 8 inch silicon wafer is used as a
substrate, more than 40 pieces of 1 inch disk can be obtained using
this method.

      Fig. 2(a) to (e) shows an example of a disk process flow on a
silicon wafer 3, (a) texturing 4, (b) magnetic layer 5 deposition,
(c) grooves 6 for discrete track and servo pit, (d) overcoat 7
deposition, and (e) etching 8 for disk separation.

      Fig. 3 shows a top view of manufactured disk using this
technique.  There are discrete track 9, texturing pattern 10, and
servo pit 11 on the disk.

      This technique reduces production cost for the small media disk
drastically, because large number of disks are fabricated on a wafer
in...