Browse Prior Art Database

Automatic Handler Mechanism for Green-Sheet Processing

IP.com Disclosure Number: IPCOM000103839D
Original Publication Date: 1993-Feb-01
Included in the Prior Art Database: 2005-Mar-18
Document File: 4 page(s) / 114K

Publishing Venue

IBM

Related People

Bemanseder, M: AUTHOR [+8]

Abstract

Disclosed is a hardware mechanism for automatically handling green sheets, as used in the fabrication of semiconductor circuit boards. The mechanism provides contamination free processing for the automatic inspection and sorting of the green sheets used in conjunction with robotic devices.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 52% of the total text.

Automatic Handler Mechanism for Green-Sheet Processing

      Disclosed is a hardware mechanism for automatically handling
green sheets, as used in the fabrication of semiconductor circuit
boards.  The mechanism provides contamination free processing for the
automatic inspection and sorting of the green sheets used in
conjunction with robotic devices.

      In prior art, green sheets were fed manually by an operator
into a pattern inspection station.  This process was slow and error
prone and subjected to contamination.  The concept described herein
provides an automatic processe of handling the green sheets thereby
reducing operator handling and provides contamination free
implementation of the green sheets.  The automatic handler mechanism
consists of three units; controller, robotic control and work
station.  Fig. 1a shows the controller unit, Fig. 1b shows the
robotic controlled mechanism and Fig. 1c shows the work station unit.

In actual operation, four sequences take place as follows:

1.  Start-up Cycle

    o   Operation 10 initiates the start-up cycle.

    o   Robot 11 moves the rework station 12 in front of first
        magazine 13.  Robot 11 then moves to the position of the
        lowering fork 14 and then moves forward inside first magazine
        13, then up to grasp the first tray.  It then moves away from
        first magazine 13 so as to place the tray inside first tray
        fixture 15.  Robot 11 then moves way from first tray fixture
        15 and raises fork 14.

    o   Robot 11 then moves to good station 16, picks the first empty
        tray from second magazine 17 and places it on second tray
        fixture 18 in the same sequence as in b) above.

    o   Robot 11 then moves to input station 19, picks the first
        green sheet tray (not shown) from third magazine 20 and
        places it on third tray fixture 21 in the same sequence as b)
        above.

2.  First Cycle

    o   Robot 11 moves on top of third tray fixture 21.  If sensing
        unit 22 detects a spacer (not shown), robot 11 will move down
        and pick up the spacer and move to spacer basket position 23
        dropping the spacer and then move back to the position at
        third tray fixture 21.

    o   If sensing unit 22 detects a green sheet, robot 17 moves down
        to pick up a green sheet.  The green sheet is checked for the
        correct orientation and for the top and bottom layer.
        Pick-up head 24 rotates after the orientation and top/bottom
        correctness and moves down to pick the spacer, if there is a
        spacer in the tray.

    o   Robot 11 then moves to position 23, then drops the spacer
        off.

    o   Robot 11 moves to pattern inspection station 25, rotates
        pick-up head 24, moves...