Browse Prior Art Database

Energetic Oblique Angle Deposition of Anisotropic Amorphous Diamond

IP.com Disclosure Number: IPCOM000103868D
Original Publication Date: 1993-Feb-01
Included in the Prior Art Database: 2005-Mar-18
Document File: 2 page(s) / 34K

Publishing Venue

IBM

Related People

Cuomo, JJ: AUTHOR [+2]

Abstract

Disclosed is a method for preparing anisotropic amorphous diamond. Amorphous diamond is a term used to describe a material which is essentially pure carbon, is amorphous in structure, contains a predominance of sp sup 3 C-C bonds (gt % 50 '%') and exhibits many of the properties of natural diamond (e.g., hard, insulating, transparent, inert). It has been shown that the preparation of amorphous diamond requires energetic condensation, i.e., the depositing species arrive with kinetic energies well above those associated with the thermal deposition regime [*] Three methods of energetic condensation which may be used to prepare amorphous diamond are ion beam sputtering, pulsed laser deposition and cathodic arc deposition.

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Energetic Oblique Angle Deposition of Anisotropic Amorphous Diamond

      Disclosed  is  a  method for preparing anisotropic amorphous
diamond.  Amorphous diamond is a term used to describe a material
which is essentially pure carbon, is amorphous in structure, contains
a predominance of sp sup 3 C-C  bonds (gt % 50 '%') and exhibits many
of the  properties  of  natural  diamond (e.g., hard,  insulating,
transparent, inert).   It has been shown that the preparation  of
amorphous  diamond  requires energetic  condensation,  i.e., the
depositing species arrive with kinetic energies well above those
associated  with  the thermal  deposition  regime [*]   Three methods
of energetic condensation which may be used to prepare amorphous
diamond are  ion  beam  sputtering,  pulsed  laser  deposition and
cathodic arc deposition.  Using these  processes,  isotropic films
with  a  high  degree  of  diamond  character  may be obtained.

      When these procedures  are  coupled  with  a  substrate which
is  oriented  such that the particles are incident at oblique
angles,  anisotropy  is  induced  into  the  films.  Specifically,
films  deposited  onto transparent substrates are shown to polarize
light.  In addition, anisotropy in the biaxial stress develops, as
the compressive stress along the direction of incidence decreases
below that  observed  along the   perpendicular  direction.    These
effects  are  most...