Browse Prior Art Database

Vertical Recording Probe Head Made by Horizontal Head Process

IP.com Disclosure Number: IPCOM000103896D
Original Publication Date: 1993-Feb-01
Included in the Prior Art Database: 2005-Mar-18
Document File: 2 page(s) / 63K

Publishing Venue

IBM

Related People

Beaulieu, TJ: AUTHOR [+2]

Abstract

In Paper EQ-08 given at the 1989 IEEE Intermag Conference, and published in the Proceedings Volume (September 1989) for the 1989 INTERMAG conference, A New Approach to Making Thin Film Head-Slider Devices was published which described a horizontal head processing approach in which the air-bearing layer and head elements are deposited on a substrate wafer, and then a slider body wafer is attached to the overcoated head elements by field-assisted bonding. Electrical contacts are made to the head elements through preformed vias in the slider body wafer. The head element substrate wafer is ultimately etched away to expose the air bearing surface. This general approach can also be used to make probe head for vertical recording by the method to be described as follows:

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Vertical Recording Probe Head Made by Horizontal Head Process

      In Paper EQ-08 given at the 1989 IEEE Intermag Conference, and
published in the Proceedings Volume (September 1989) for the 1989
INTERMAG conference, A New Approach to Making Thin Film Head-Slider
Devices was published which described a horizontal head processing
approach in which the air-bearing layer and head elements are
deposited on a substrate wafer, and then a slider body wafer is
attached to the overcoated head elements by field-assisted bonding.
Electrical contacts are made to the head elements through preformed
vias in the slider body wafer.  The head element substrate wafer is
ultimately etched away to expose the air bearing surface.  This
general approach can also be used to make probe head for vertical
recording by the method to be described as follows:

      The figure describes the probe head structure made on a
removable substrate (Corning Glass Works' Fotoform Opal glass
ceramic), with the substrate and various etch stop layers underneath
the air bearing surface (ABS) not yet removed.  Labels in the figure
indicate how to remove these underneath layers without damaging the
ABS.  As shown in the figure, which provides a cross-sectional view
of the head element, the recording probe is a thin NiFe film making a
45 degree angle to the air bearing surface, and to the plane of the
recording medium.  Computer modeling shows that this 45 degree angle
causes the readback pulses from the...