Browse Prior Art Database

Temperature Stable Amorphous Diamond

IP.com Disclosure Number: IPCOM000104063D
Original Publication Date: 1993-Mar-01
Included in the Prior Art Database: 2005-Mar-18
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Cuomo, JJ: AUTHOR [+2]

Abstract

Disclosed is the discovery that amorphous diamond films exhibit superior high temperature stability compared to conventional diamond-like carbon.

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This is the abbreviated version, containing approximately 70% of the total text.

Temperature Stable Amorphous Diamond

      Disclosed is the discovery that amorphous diamond films exhibit
superior high temperature stability compared to conventional
diamond-like carbon.

      Amorphous diamond is a term used to describe a material which
is essentially pure carbon, is amorphous in structure, contains a
predominance of sp sup 3 C-C bonds (>  50 %), and exhibits many of
the properties of natural diamond.  Traditionally, amorphous carbon
materials with diamond properties have been designated as
diamond-like carbon (DLC).  These materials contain significant
amounts of hydrogen and degrade at elevated temperatures.  The
degradation is manifested as a loss of hydrogen and a substantial
increase in optical absorption.  Most of the diamond-like properties
are lost as a result of the temperature-induced deterioration.

      Amorphous diamond films produced by pulsed laser deposition and
cathodic arc are 70-90% sp sup 3 bonded, contain no hydrogen (<  1%),
are highly transparent (extinction coefficients (k) <  0.15), hard
(80-90 GPa), chemically inert, and exhibit optical bandgaps of
1.4-2.4 eV (1,2).

      Thermal stability of amorphous diamond is demonstrated by
depositing the material onto Si and c-sapphire wafers, placing these
wafers in thermal contact with a radiatively heated plate in vacuum
or in a quartz oven under inert atmosphere, and heating to 850º
C.  The film transparency, Raman spectra and optical bandgap exhibit
no si...