Browse Prior Art Database

Technique for Improvement of Spatial Resolution in Electron-Beam-Induced-Current Measurement

IP.com Disclosure Number: IPCOM000104423D
Original Publication Date: 1993-Apr-01
Included in the Prior Art Database: 2005-Mar-19
Document File: 2 page(s) / 57K

Publishing Venue

IBM

Related People

Tokuhiro, O: AUTHOR

Abstract

Disclosed is a technique which suppress diffusion of minority carriers generated by electron beam impingement by applying a vertical magnetic field, thereby improving spatial resolution in the detection of defects in Electron-Beam-Induced-Current (EBIC) analysis.

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Technique for Improvement of Spatial Resolution in Electron-Beam-Induced-Current Measurement

      Disclosed is a technique which suppress diffusion of minority
carriers generated by electron beam impingement by applying a
vertical magnetic field, thereby improving spatial resolution in the
detection of defects in Electron-Beam-Induced-Current (EBIC)
analysis.

      EBIC analysis has extensively used for semiconductor
characterization as well as for failure analysis.  In EBIC
measurement, the charge carriers generated by electron beam
impingement to a semiconductor material are collected by an internal
electric field within the semiconductor and sensed as a current in an
external circuit.  Material imperfections are detected by measurement
of variations in collected charge.  When an electron beam impinge in
the vicinity of defects, recombination of free electrons and free
holes occurs at the defects and the collected charge consequently
decreases.  The location of defects is determined by detecting the
change in the collected charge.

      However, the spatial resolution of EBIC measurement is limited
by a lateral diffusion of minority carriers.  The technique described
herein improves the spatial resolution with a vertical magnetic
field.  Under a vertical magnetic field, a carrier diffusion path is
modified from a random movement to a part of circular orbit by the
Lorentz force.  When a magnetic field is high enough to make the
orbit diameter shorter...