Browse Prior Art Database

Potential Low Cost Fiber Coupling to Waveguide using Si V-Groove

IP.com Disclosure Number: IPCOM000104463D
Original Publication Date: 1993-Apr-01
Included in the Prior Art Database: 2005-Mar-19
Document File: 2 page(s) / 56K

Publishing Venue

IBM

Related People

Canora, F: AUTHOR [+4]

Abstract

Disclosed system is a low cost approach to fiber coupling of single mode fibers to optical wavegudies using Si v-grooves. In particular, this technique is developed for the coupling of single mode fiber with the grating demultiplexor currently under devleopment. A coupling loss of &app.5 dB is antiicpated with such scheme.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 66% of the total text.

Potential Low Cost Fiber Coupling to Waveguide using Si V-Groove

      Disclosed system is a low cost approach to fiber coupling of
single mode fibers to optical wavegudies using Si v-grooves.  In
particular, this technique is developed for the coupling of single
mode fiber with the grating demultiplexor currently under
devleopment.  A coupling loss of &app.5 dB is antiicpated with such
scheme.

It is well known that Si v-groove can provide excellent positioning
for single mode fibers with tolerance of n0.25 &mu.m.  Such accuracy
can couple single mode fiber into single mode waveguide with low loss
(&app.5 dB).  A typical Si v-groove is shown in Fig.1.  The most
practical v-groove is fabricated on the (100)-Si surface.
Intersections of the (111) planes with (100) and (110) surfaces
provide the v-groove of 70.52º  on four sides.  Two problems
arise when apply v-groove technology to the grating demultiplexor.

1.  The Si waveguide layer is &app.30 &mu.m thick.  Although this
    layer can be the mask for the fabrication of the v-groove, the
    thickness prohibits high accuracy for the etching of the
    v-groove, owing to the inaccuracy of positioning when the
    reactive ion etching process reaches the bottom of the SiO sub 2
    waveguiding layers.  Furthermore, if v-groove is fabricated after
    the fabrication of the waveguiding layers, these layers could be
    damaged during the v-groove fabrication process.  Thus, v-groove
    f...