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High Resolution Thermography of Microelectronic Devices by Electron Beam Charging Dielectric Coatings

IP.com Disclosure Number: IPCOM000104465D
Original Publication Date: 1993-Apr-01
Included in the Prior Art Database: 2005-Mar-19
Document File: 2 page(s) / 169K

Publishing Venue

IBM

Related People

Jakubowicz, A: AUTHOR

Abstract

Generation of heat in microelectronic devices is a problem that has been addressed for many years, and it becomes more and more serious with the continuous interest in reducing the dimensions of devices. For recording temperature distributions, several techniques have been developed in the past, employing for example photo-acoustic signals, liquid crystals, the mirage effect, Raman scattering, or light reflectance modulation. Each of these techniques offers some advantages, but has also clear limitations. In terms of applicability such techniques are of particular interest which are simple and fast.

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High  Resolution  Thermography  of  Microelectronic  Devices by Electron Beam Charging Dielectric Coatings

      Generation of heat in microelectronic devices is a problem that
has been addressed for many years, and it becomes more and more
serious with the continuous interest in reducing the dimensions of
devices.  For recording temperature  distributions,  several
techniques  have  been  developed  in  the  past, employing for
example photo-acoustic signals,  liquid  crystals,  the  mirage
effect,  Raman  scattering,  or  light  reflectance modulation.  Each
of these techniques offers some advantages, but  has  also clear
limitations.   In terms of applicability such techniques are of
particular interest which are simple and fast.

      Here, a novel high resolution  thermographic  technique  is
proposed,  which can be applied in scanning electron microscopy
inspection of devices.

      The proposed EBCT  (Electron  Beam  Charging  Thermography)
technique  employs charging a thin insulating film deposited onto the
device, by scanning the film with an electron beam  in a  scanning
electron  microscope  (SEM).  Hot regions on the device surface
modify locally  the  charge in  the  insulating film.  This  modified
charge distribution, induced by device operation, is imaged in the
secondary electron mode of the SEM.  Fig. 1 demonstrates how the
proposed technique operates.  It shows  a series of thermographic
im...