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Browse Prior Art Database

Improving the Positioning Accuracy in Multilayer Ceramic Fabrication

IP.com Disclosure Number: IPCOM000104623D
Original Publication Date: 1993-May-01
Included in the Prior Art Database: 2005-Mar-19
Document File: 2 page(s) / 22K

Publishing Venue

IBM

Related People

Eichler, C: AUTHOR

Abstract

The following equation is used to characterize individual X/Y-positioning systems employed in multilayer ceramic fabrication. where

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Improving the Positioning Accuracy in Multilayer Ceramic Fabrication

      The following equation is used to characterize individual
X/Y-positioning systems employed in multilayer ceramic fabrication.
where

      VXi/VYi   is the resulting positioning error at a point i on
the substrate;

      TX/TY     is the constant mismatch along the X- and the Y-axis
on the substrate;

      MX/MY     is the magnification error along the X- and the
Y-axis, and

      ROTX/Y    is the tangential error along the X- and the Y-axis.

      This equation is used in a control unit to compensate for
misalignment of the substrate caused by tolerances of the positioning
system.