Browse Prior Art Database

Fine Adjustment of Toolbits in Micromilling Spindels

IP.com Disclosure Number: IPCOM000104790D
Original Publication Date: 1993-Jun-01
Included in the Prior Art Database: 2005-Mar-19
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Abstract

This article describes a fine adjustment means for toolbits in micromilling spindles.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 58% of the total text.

Fine Adjustment of Toolbits in Micromilling Spindels

      This article describes a fine adjustment means for toolbits in
micromilling spindles.

      Micromilling equipment, using specially polished natural diamonds
mounted in steel holders as milling tools, is currently used to produce
ultrafine surfaces of laser mirror quality (peak-to-valley depths < 50 nm).
Improvements have been made by IBM to allow the production of planar
(+- 0.1 my/200 mm) ultrafine (peak-to-valley depth < 50 tim) and
thickness-tolerated (+- 0.5 my) thin-film layers in multilayer ceramic
technology. For the required tolerances of +- 0.1 my, the fine-cutting
diamond in the air-cushioned milling spindle must be adjustable in the
Z-direction relative to a previously milled surface or to the other
toolbits. To meet this requirement for fine-cutting diamonds, the
invention described in this article assumes that all movable components
are adjustable without tolerances.

      Referring to Figs. 1 and 2, diamond holder 1 is inserted into
dovetail guide 2 and held in place by clamping screw 3. By tightening
screw 6, actuating a clamping wedge 5, guide 2 is guided without backlash
in housing 4. Guide 2 is adjusted in the Z-direction by coarse-adjustment
ring 8 and fine-adjustment ring 7. This ring combination was chosen for
accuracy and to permit a relatively long path of adjustment.
Coarse-adjustment ring 8 is held in the Z-axis by several guide jaws 9
fitted to the circumference of the spindl...