Browse Prior Art Database

Focus Matrix Calculation and Update Program for Perkin-Elmer 500/600 Photo Aligners

IP.com Disclosure Number: IPCOM000105221D
Original Publication Date: 1993-Jun-01
Included in the Prior Art Database: 2005-Mar-19
Document File: 1 page(s) / 29K

Publishing Venue

IBM

Related People

Major, JC: AUTHOR

Abstract

Disclosed is a computer program interfacing with a Perkin-Elmer Auto Set-Up and Monitoring (ASM) system for automatically calculating focus from focus-matrix data, and for automatically updating the tool configuration file with the new focus data.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Focus Matrix Calculation and Update Program for Perkin-Elmer 500/600 Photo Aligners

      Disclosed is a computer program interfacing with a Perkin-Elmer
Auto Set-Up and Monitoring (ASM) system for automatically calculating
focus from focus-matrix data, and for automatically updating the tool
configuration file with the new focus data.

The sequence of steps executed by the program is as follows:

1.  (Manual operation).  Exit the ASM system.
2.  (Manual operation).  Enter focus-matrix data and current focus
    setting.
3.  Read appropriate ASM files in to program.
4.  Compare current focus setting to baseline focus from ASM file.
    If these values are not equal, return to the ASM system or rechec
    k the manually input data.  Otherwise, continue.
5.  alculate the focus corrections.
6.  heck the correction.  If greater than twice the normal
    correction, give the operator the option to enter an override
    code.
7.  f an override code is not entered, then return to the ASM system.
    Otherwise, continue.
8.  alculate the new focus values.
9.  pdate the ASM files and return them to the disk.
10. Return to the ASM system.
11. (Manual operation).  Download the tool configuration file.

Disclosed Anonymously.