Browse Prior Art Database

No-Particle Gun

IP.com Disclosure Number: IPCOM000105249D
Original Publication Date: 1993-Jul-01
Included in the Prior Art Database: 2005-Mar-19
Document File: 2 page(s) / 28K

Publishing Venue

IBM

Related People

Kitagawa, S: AUTHOR

Abstract

Disclosed is an air gun which is used to blow away dust particles on a silicon wafer, photo-mask, thin film without blowing dust particles stuck on the inner surface of the air gun.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

No-Particle Gun

      Disclosed is an air gun which is used to blow away dust
particles on a silicon wafer, photo-mask, thin film without blowing
dust particles stuck on the inner surface of the air gun.

      The construction of the air gun is shown in the figure and the
operation of the gun follows.  When valve 7 opens, air flows from the
back chamber 6 to the front chamber 2 through the valve 7 and the
filter 5.  At this time, air in the front chamber 2 is accumulated
and the pressure in the front chamber 2 becomes higher.  The high
pressure cause air flow from the front chamber 2 to the back chamber
6 through the orifice 4.  Dust particles stuck on the inner surface
of the air gun are carried out to the back chamber 6 by the air flow
through the orifice 4, and the dust particles are blown at the back
of the air gun.  Therefore, the only clean air flows through needle 1
and is blown to the target.